Repository logo

Infoscience

  • English
  • French
Log In
Logo EPFL, École polytechnique fédérale de Lausanne

Infoscience

  • English
  • French
Log In
  1. Home
  2. Academic and Research Output
  3. Conferences, Workshops, Symposiums, and Seminars
  4. Cryogenic InGaAs HEMTs with Reduced On-Resistance using Strained Ohmic Contacts
 
conference paper

Cryogenic InGaAs HEMTs with Reduced On-Resistance using Strained Ohmic Contacts

Cha, E.
•
Ferraris, A.
•
Mueller, P.
Show more
2023
Technical Digest - International Electron Devices Meeting, IEDM
International Electron Devices Meeting

We present InGaAs HEMTs with optimized cryogenic Ohmic contacts, for low-power qubit readout. We utilize tensile strained contact metals to reduce the barrier resistance, which is a major fraction of RSD, leading to ~50% reduction of RSD at low temperature. At 4 K, a ~50% lower RON is shown with tensile strained contacts and demonstrated contact resistance of 30.6 O • µm and RON of 290 O • µm at LG = 130 nm, among the lowest reported values for cryogenic HEMT technology. As a result, the InGaAs HEMTs exhibit a record-low value of the noise indication factorv IDS/gm = 0.18v V · mm/S, at the lowest DC power consumption reported in cryogenic low-noise HEMTs. RF measurements and small-signal model parameters are also presented. The results demonstrate that contact engineering is key to enhance the performance of cryogenic InGaAs HEMTs for future large-scale quantum computing applications.

  • Details
  • Metrics
Type
conference paper
DOI
10.1109/IEDM45741.2023.10413869
Scopus ID

2-s2.0-85185579371

Author(s)
Cha, E.

IBM Research – Europe

Ferraris, A.

IBM Research – Europe

Mueller, P.

IBM Research – Europe

Han, H. C.  

École Polytechnique Fédérale de Lausanne

Caimi, D.

IBM Research – Europe

Sousa, M.

IBM Research – Europe

Enz, C.  

École Polytechnique Fédérale de Lausanne

Zota, C. B.

IBM Research – Europe

Date Issued

2023

Publisher

Institute of Electrical and Electronics Engineers Inc.

Published in
Technical Digest - International Electron Devices Meeting, IEDM
ISBN of the book

9798350327670

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
AQUA  
MSIC-LAB  
Event nameEvent acronymEvent placeEvent date
International Electron Devices Meeting

San Francisco, United States

2023-12-09 - 2023-12-13

FunderFunding(s)Grant NumberGrant URL

BRNC

European Union H2020 program SEQUENCE

–871764

Swiss National Science Foundation

51NF40-180604

Show more
Available on Infoscience
January 26, 2025
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/244638
Logo EPFL, École polytechnique fédérale de Lausanne
  • Contact
  • infoscience@epfl.ch

  • Follow us on Facebook
  • Follow us on Instagram
  • Follow us on LinkedIn
  • Follow us on X
  • Follow us on Youtube
AccessibilityLegal noticePrivacy policyCookie settingsEnd User AgreementGet helpFeedback

Infoscience is a service managed and provided by the Library and IT Services of EPFL. © EPFL, tous droits réservés