Cryogenic InGaAs HEMTs with Reduced On-Resistance using Strained Ohmic Contacts
We present InGaAs HEMTs with optimized cryogenic Ohmic contacts, for low-power qubit readout. We utilize tensile strained contact metals to reduce the barrier resistance, which is a major fraction of RSD, leading to ~50% reduction of RSD at low temperature. At 4 K, a ~50% lower RON is shown with tensile strained contacts and demonstrated contact resistance of 30.6 O • µm and RON of 290 O • µm at LG = 130 nm, among the lowest reported values for cryogenic HEMT technology. As a result, the InGaAs HEMTs exhibit a record-low value of the noise indication factorv IDS/gm = 0.18v V · mm/S, at the lowest DC power consumption reported in cryogenic low-noise HEMTs. RF measurements and small-signal model parameters are also presented. The results demonstrate that contact engineering is key to enhance the performance of cryogenic InGaAs HEMTs for future large-scale quantum computing applications.
2-s2.0-85185579371
IBM Research – Europe
IBM Research – Europe
IBM Research – Europe
École Polytechnique Fédérale de Lausanne
IBM Research – Europe
IBM Research – Europe
École Polytechnique Fédérale de Lausanne
IBM Research – Europe
2023
9798350327670
REVIEWED
EPFL
| Event name | Event acronym | Event place | Event date |
San Francisco, United States | 2023-12-09 - 2023-12-13 | ||
| Funder | Funding(s) | Grant Number | Grant URL |
BRNC | |||
European Union H2020 program SEQUENCE | –871764 | ||
Swiss National Science Foundation | 51NF40-180604 | ||
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