research article
Micromachined silicon cantilevers and tips for bidirectional force microscopy
1992
A monocrystalline silicon lever with an integrated silicon tip for a force/friction microscope was realized. Theoretical studies have been carried out to find the shape and dimensioning according to the mechanical system requirements. Moreover, sharp tips with a high aspect ratio could be demonstrated.
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Buser, R. A., Brugger, J., & de Rooij, N. F. (1992). Micromachined silicon cantilevers and tips for bidirectional force microscopy. Ultramicroscopy, 42-44, 1476–1480. https://doi.org/10.1016/0304-3991(92)90469-Z
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