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research article

Conductive SU8 Photoresist for Microfabrication

Jiguet, Sébastien  
•
Bertsch, Arnaud  
•
Hofmann, H.  
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2005
Advanced Functional Materials

A conductive composite photoresist has been developed for the direct photopatterning of electrodes. It is based on a dispersion of silver nanoparticles in SU8, a non-conductive, negative-tone photoresist. Manufactured structures have an electrical conductivity at a low silver content of around 6 vol.-%

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Jiguet'05-AdvFunctMat.pdf

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