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research article

Conductive SU8 Photoresist for Microfabrication

Jiguet, Sébastien  
•
Bertsch, Arnaud  
•
Hofmann, H.  
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2005
Advanced Functional Materials

A conductive composite photoresist has been developed for the direct photopatterning of electrodes. It is based on a dispersion of silver nanoparticles in SU8, a non-conductive, negative-tone photoresist. Manufactured structures have an electrical conductivity at a low silver content of around 6 vol.-%

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Type
research article
DOI
10.1002/adfm.200400575
Web of Science ID

WOS:000231768500017

Author(s)
Jiguet, Sébastien  
Bertsch, Arnaud  
Hofmann, H.  
Renaud, Philippe  
Date Issued

2005

Published in
Advanced Functional Materials
Issue

15

Start page

1511

End page

1516

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LMIS4  
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/217049
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