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  4. Equivalent Circuit Analysis of CMUTs-based Device for Measurement in Liquid Samples
 
conference paper

Equivalent Circuit Analysis of CMUTs-based Device for Measurement in Liquid Samples

Zhao, Yihe  
•
Zhao, Libo
•
Barbruni, Gian Luca  
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January 1, 2021
2021 Ieee International Symposium On Medical Measurements And Applications (Ieee Memea 2021)
16th IEEE International Symposium on Medical Measurements and Applications (IEEE MeMeA)

Capacitive micromachined ultrasonic transducers (CMUTs) operating at the series and parallel resonant frequencies, have shown a great potential in ultrasonic application and in biodetection. However, previous equivalent circuits rarely consider the fitting performance and measurement. This study proposes the establishment of the simplified equivalent circuits for the CMUTs-based device to analyze the electrical properties and the measurement sensitivity in liquid environment. We simulate a circular CMUT cell both in air and water through finite element method via COMSOL software, exploiting the multi-domain coupling method. We analyze the impedance behaviors of the CMUTs array with 100 cells under different direct current bias voltages (2 - 10V). Simultaneously, we successfully investigate the damping effects on the electrical characteristics such as impedance, phase, and quality factor. With the 4-element Butterworth-vanDyke model, two simplified equivalent lumped element models (LEMs) are demonstrated to fit the impedance curves of the CMUTs array around the series and parallel frequencies, respectively. Additionally, the sensitivity is evaluated using the simplified equivalent LEMs to explore the CMUTs array has a high normalized measurement sensitivity of 6.024 ppb/Hz at the parallel frequency.

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Type
conference paper
DOI
10.1109/MeMeA52024.2021.9478722
Web of Science ID

WOS:000847048100071

Author(s)
Zhao, Yihe  
Zhao, Libo
Barbruni, Gian Luca  
Li, Zhikang
Jiang, Zhuangde
Carrara, Sandro  
Date Issued

2021-01-01

Publisher

IEEE

Publisher place

New York

Published in
2021 Ieee International Symposium On Medical Measurements And Applications (Ieee Memea 2021)
ISBN of the book

978-1-6654-1914-7

Series title/Series vol.

IEEE International Symposium on Medical Measurements and Applications Proceedings-MeMeA

Subjects

Engineering, Biomedical

•

Engineering

•

cmuts-based device

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measurement

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butterworth-vandyke model

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simplified lumped equivalent model

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liquid environment

•

array

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
ICLAB  
Event nameEvent placeEvent date
16th IEEE International Symposium on Medical Measurements and Applications (IEEE MeMeA)

ELECTR NETWORK

Jun 23-25, 2021

Available on Infoscience
September 26, 2022
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/190943
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