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research article

Physical principles and miniaturization of Spark Assisted Chemical Engraving (SACE)

Wüthrich, Rolf
•
Hof, L.A.
•
Lal, Ashwin  
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2005
Journal of Micromechanics and Microengineering

Spark assisted chemical engraving (SACE) is an unconventional micromachining technology based on electrochemical discharge phenomena for glass and various ceramics. The limits of SACE with respect to small dimensions in the particular case of glass are explored. It is found, using a specially developed set-up based on an AFM, that even using extremely sharp tool-electrodes does not allow us to produce a smaller pattern than typically 25 micrometers. It is concluded that the gas film thickness, in which the electrochemical discharges take place, is the main limiting factor. Further experimental investigations on its formation are investigated. By adding surfactants to the electrolyte, in order to increase the wettability of the tool-electrode and therefore to reduce the gas film thickness, it is observed experimentally that the critical voltage reduces significantly. This observation may lead to a novel method of characterizing the gas film thickness in SACE.

  • Details
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Type
research article
DOI
10.1088/0960-1317/15/10/S03
Web of Science ID

WOS:000233093900004

Author(s)
Wüthrich, Rolf
Hof, L.A.
Lal, Ashwin  
Fujisaki, K.  
Bleuler, Hannes  
Mandin, Philippe
Picard, Gérard
Date Issued

2005

Published in
Journal of Micromechanics and Microengineering
Volume

15

Start page

268

End page

275

Subjects

SACE

•

Glass micro-machining

•

Micro-factory

•

Robotics

•

Microengineering

•

[SACE]

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LSRO  
Available on Infoscience
June 2, 2006
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/230290
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