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Wüthrich, R., Hof, L. A., Lal, A., Fujisaki, K., Bleuler, H., Mandin, P., & Picard, G. (2005). Physical principles and miniaturization of Spark Assisted Chemical Engraving (SACE). Journal of Micromechanics and Microengineering, 15, 268–275. https://doi.org/10.1088/0960-1317/15/10/S03

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