AFM imaging with an xy-micropositioner with integrated tip

Indermühle, P.-F.; Jaecklin, V. P.; Brugger, J; Linder, C; de Rooij, N F; Binggeli, M.

doi:10.1016/0924-4247(94)00962-H

research article

AFM imaging with an xy-micropositioner with integrated tip

Indermühle, P.-F.

•

Jaecklin, V. P.

•

Brugger, J

1995

Sensors and Actuators A: Physical

We have fabricated an xy-microstage with integrated protruding tip and electrostatic comb actuators for scanning probe surface imaging. This device, which is micromachined in monocrystalline silicon, nas been actuated and characterized and, for the first time with a such a microtool, an atomic force microscope (AFM) profile has been achieved.

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Indermühle, P.-F., Jaecklin, V. P., Brugger, J., Linder, C., de Rooij, N. F., & Binggeli, M. (1995). AFM imaging with an xy-micropositioner with integrated tip. Sensors and Actuators A: Physical, 46-47, 562–565. https://doi.org/10.1016/0924-4247(94)00962-H

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