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  4. Beyond the Mask: Advancing Fabrication and Immersive Learning
 
conference paper

Beyond the Mask: Advancing Fabrication and Immersive Learning

Shan, Qinglan  
•
Erbas, Berke  
•
Park, Jongeon  
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June 29, 2025
2025 23rd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)
2025 23rd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)

This paper presents advances in micro and nanofabrication techniques beyond conventional lithographic masks with examples of inkj et printing, nanostencil lithography, molecular-level doping methods, and thermal scanning probe lithography. These methods enable novel process flows, material combinations, and grayscale patterning at various scales. Complementarily, we introduce immersive training strategies for cleanroom education, using mixed reality to enhance conceptual understanding and engagement. Early trials at EPFL show promising results in learner motivation and skill transfer. Together, these developments offer a blueprint for future transducer research and education where new fabrication tools are matched by next generation learning environments.

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Type
conference paper
DOI
10.1109/transducers61432.2025.11111244
Author(s)
Shan, Qinglan  

École Polytechnique Fédérale de Lausanne

Erbas, Berke  

École Polytechnique Fédérale de Lausanne

Park, Jongeon  

École Polytechnique Fédérale de Lausanne

Torres-Vila, Pol  

École Polytechnique Fédérale de Lausanne

Zhang, Chenxiang  

École Polytechnique Fédérale de Lausanne

Bertsch, Arnaud  

École Polytechnique Fédérale de Lausanne

Brugger, Juergen  

École Polytechnique Fédérale de Lausanne

Date Issued

2025-06-29

Publisher

IEEE

Published in
2025 23rd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)
ISBN of the book

979-8-3315-1381-8

Start page

112

End page

117

Subjects

Mask-less patterning

•

process flow education

•

digital cleanroom training

•

thermal scanning probe lithography (tSPL)

•

nanostencil lithography (nSL)

•

inkjet printing (IJP)

•

monolayer doping (MLD)

•

precision polymer doping (PPD)

•

massive open online course (MOOC)

•

augmented/virtual/mixed reality (AR/VR/MR)

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LMIS1  
Event nameEvent acronymEvent placeEvent date
2025 23rd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)

Orlando, FL, USA

2025-06-29 - 2025-07-03

Available on Infoscience
August 26, 2025
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/253510
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