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conference paper

Beyond the Mask: Advancing Fabrication and Immersive Learning

Shan, Qinglan  
•
Erbas, Berke  
•
Park, Jongeon  
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June 29, 2025
2025 23rd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)
2025 23rd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)

This paper presents advances in micro and nanofabrication techniques beyond conventional lithographic masks with examples of inkj et printing, nanostencil lithography, molecular-level doping methods, and thermal scanning probe lithography. These methods enable novel process flows, material combinations, and grayscale patterning at various scales. Complementarily, we introduce immersive training strategies for cleanroom education, using mixed reality to enhance conceptual understanding and engagement. Early trials at EPFL show promising results in learner motivation and skill transfer. Together, these developments offer a blueprint for future transducer research and education where new fabrication tools are matched by next generation learning environments.

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