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  4. Low-noise high-dynamic-range single-photon avalanche diodes with integrated PQAR circuit in a standard 55 nm BCD
 
conference paper

Low-noise high-dynamic-range single-photon avalanche diodes with integrated PQAR circuit in a standard 55 nm BCD

Keshavarzian, Pouyan  
•
Gramuglia, Francesco  
•
Kizilkan, Ekin  
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January 1, 2022
Advanced Photon Counting Techniques Xvi
Conference on Advanced Photon Counting Techniques XVI

Single-photon avalanche diode (SPAD) based sensors and systems enable a variety of applications in biomedical, automotive, consumer, and security domains. While several established standard technologies, which can facilitate the design of SPAD-based systems are already in existence, challenges remain for the development of deep sub-micron monolithic integration of circuits and SPADs. In this work, we present SPADs along with pixel circuits in a standard GF 55 nm BCDL process. Two different designs demonstrate the flexibility allowed by the technology for a variety of applications. Both shallow and deep junction SPADs present excellent noise performance of less than 1 cps/mu m(2) at 3 V excess bias. An integrated passive-quench active-recharge (PQAR) circuit is used in conjunction with the SPADs, which enables a dead time of less than 2 ns, easily allowing for high dynamic range applications that require > 100 Mcps such as quantum communication and information technologies. The deep and shallow junction SPADs demonstrate an afterpulsing probability of < 0.5 % and < 2 % at 3V excess bias, respectively. The dead time is adjustable through analog control of the active-recharge circuit, allowing for afterpulsing reduction to below 0.1 % while maintaining Mcps operation. The shallow junction, which has a breakdown voltage of about 18 V and a peak sensitivity at 430 nm is particularly interesting for applications requiring low supply voltage, whereas the deep SPAD, which demonstrates > 4 % photon detection probability (PDP) at 940 nm, can be implemented in LiDAR sensors that require enhanced sensitivity at near-infrared (NIR) wavelengths. The measured timing jitter of both SPADs is < 50 ps FWHM at 3 V excess bias and 780 nm.

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Type
conference paper
DOI
10.1117/12.2618349
Web of Science ID

WOS:000839268300010

Author(s)
Keshavarzian, Pouyan  
Gramuglia, Francesco  
Kizilkan, Ekin  
Bruschini, Claudio  
Tan, Shyue Seng
Tng, Michelle
Chong, Daniel
Quek, Elgin
Lee, Myung-Jae  
Charbon, Edoardo  
Date Issued

2022-01-01

Publisher

SPIE-INT SOC OPTICAL ENGINEERING

Publisher place

Bellingham

Published in
Advanced Photon Counting Techniques Xvi
ISBN of the book

978-1-5106-5055-8

978-1-5106-5054-1

Series title/Series vol.

Proceedings of SPIE

Volume

12089

Start page

120890B

Subjects

Optics

•

depth-sensing

•

lidar

•

photon counting

•

pixel circuits

•

single-photon avalanche diodes (spads)

•

time-correlated single-photon counting (tcspc)

•

spad

•

dependence

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
AQUA  
Event nameEvent placeEvent date
Conference on Advanced Photon Counting Techniques XVI

ELECTR NETWORK

Apr 05-Jun 12, 2022

Available on Infoscience
August 29, 2022
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/190336
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