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conference paper

Oxygen species in amorphous SiO2: Relative energetics and concentration of equilibrium sites

Bongiorno, A.
•
Pasquarello, Alfredo 
2001
Materials Research Society Workshop Series
International workshop on device technology : Alternatives to SiO2 as Gate Dielectric for Future Si-Based Microelectronics
Type
conference paper
Authors
Bongiorno, A.
•
Pasquarello, Alfredo 
Publication date

2001

Published in
Materials Research Society Workshop Series
Issue

31

Peer reviewed

REVIEWED

EPFL units
CSEA 
Event nameEvent placeEvent date
International workshop on device technology : Alternatives to SiO2 as Gate Dielectric for Future Si-Based Microelectronics

Porto Alegre, Brazil

September 3-5, 2001

Available on Infoscience
October 14, 2009
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/43706