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research article

Towards better scanning near-field optical microscopy probes - progress and new developments

Heinzelmann, H.
•
Freyland, J. M.
•
Eckert, R.
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1999
Journal of Microscopy

Several approaches are described with the aim of producing near-field optical probes with improved properties. Focused ion beam milling allows the fabrication of small apertures in a controlled fashion, resulting in probes with excellent polarization properties and increased transmission. Microfabrication processes are described that allow the production of apertures of 30-50 nm, facilitating the mass-fabrication of apertured tip structures that can be used in a combined force/near-field optical microscope. Finally, possible future developments are outlined.

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Type
research article
DOI
10.1046/j.1365-2818.1999.00567.x
Author(s)
Heinzelmann, H.
Freyland, J. M.
Eckert, R.
Huser, Th.
Schürmann, G.
Noell, W.  
Staufer, U.
de Rooij, N. F.  
Date Issued

1999

Published in
Journal of Microscopy
Volume

194

Issue

2

Start page

365

End page

368

Note

223

Editorial or Peer reviewed

REVIEWED

Written at

OTHER

EPFL units
SAMLAB  
Available on Infoscience
May 12, 2009
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/39385
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