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  4. Towards better scanning near-field optical microscopy probes - progress and new developments
 
research article

Towards better scanning near-field optical microscopy probes - progress and new developments

Heinzelmann, H.
•
Freyland, J. M.
•
Eckert, R.
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1999
Journal of Microscopy

Several approaches are described with the aim of producing near-field optical probes with improved properties. Focused ion beam milling allows the fabrication of small apertures in a controlled fashion, resulting in probes with excellent polarization properties and increased transmission. Microfabrication processes are described that allow the production of apertures of 30-50 nm, facilitating the mass-fabrication of apertured tip structures that can be used in a combined force/near-field optical microscope. Finally, possible future developments are outlined.

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