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  4. Measuring amplitude and phase of light emerging from microstructures with the high resolution interference microscope
 
conference presentation

Measuring amplitude and phase of light emerging from microstructures with the high resolution interference microscope

Kim, Myun Sik  
•
Scharf, Toralf  
•
Herzig, Hans Peter  
2010
8th Fraunhofer IISB Lithography Simulation Workshop
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Type
conference presentation
Author(s)
Kim, Myun Sik  
Scharf, Toralf  
Herzig, Hans Peter  
Date Issued

2010

Written at

EPFL

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OPT  
Event nameEvent placeEvent date
8th Fraunhofer IISB Lithography Simulation Workshop

Hersbruck, Germany

September 23-25, 2010

Available on Infoscience
December 13, 2010
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/62085
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