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  4. Measuring amplitude and phase of light emerging from microstructures with the high resolution interference microscope
 
conference presentation

Measuring amplitude and phase of light emerging from microstructures with the high resolution interference microscope

Kim, Myun Sik  
•
Scharf, Toralf  
•
Herzig, Hans Peter  
2010
8th Fraunhofer IISB Lithography Simulation Workshop
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