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  4. High-k dielectric FinFETs towards Sensing Integrated Circuits
 
conference paper

High-k dielectric FinFETs towards Sensing Integrated Circuits

Rigante, S.
•
Scarbolo, P.
•
Bouvet, D.  
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2013
2013 14Th International Conference On Ultimate Integration On Silicon (Ulis)
14th International Conference on Ultimate Integration on Silicon (ULIS)

This work presents a well-defined electronic device, namely a n-channel high-k dielectric FinFET (Fin Field Effect Transistor) as new label-free sensor for enhanced sensing integrated circuits. Metal gate FinFETs on bulk Si have been successfully electrically characterized, showing excellent SS (Subthreshold Slope) and high I-on/I-off ratio. Exposed n-channel FinFETs, integrated on the same die, have been demonstrated pH sensitive with high current variation per pH unit. Herein, we also describe the fabrication process, assisted by FEA (Finite Element Analysis) simulations, and the HfO2 characterization.

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Type
conference paper
DOI
10.1109/ULIS.2013.6523494
Web of Science ID

WOS:000325214300018

Author(s)
Rigante, S.
Scarbolo, P.
Bouvet, D.  
Wipf, M.
Tarasov, A.
Bedner, K.
Ionescu, A. M.  
Date Issued

2013

Publisher

IEEE

Publisher place

New York

Published in
2013 14Th International Conference On Ultimate Integration On Silicon (Ulis)
ISBN of the book

978-1-4673-4802-7

Total of pages

4

Series title/Series vol.

International Conference on Ultimate Integration on Silicon

Start page

73

End page

76

Subjects

FinFET

•

bulk Si

•

local SOI

•

high-k dielectric

•

label-free sensor

•

microfluidic platform

•

pH sensing

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
NANOLAB  
Event name
14th International Conference on Ultimate Integration on Silicon (ULIS)
Available on Infoscience
December 9, 2013
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/97555
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