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conference paper

Light confinement effect of non-spherical nanoscale solid immersion lenses

Kim, Myun-Sik  
•
Scharf, Toralf  
•
Nguyen, David
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Vonfreymann, G.
•
Schoenfeld, Wv
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2013
Advanced Fabrication Technologies For Micro/Nano Optics And Photonics Vi
Conference on Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VI

We report on the light confinement effect observed in non-ideally shaped (i.e., non-spherical) nanoscale solid immersion lenses (SILs). To investigate this effect, nanostructures of various shapes are fabricated by electron-beam lithography. When completely melted in reflow, these non-circular pillars become spherical, while incomplete melting results in non-spherically shaped SILs. Optical characterization shows that non-ideal SILs exhibit a spot size reduction comparable to that of spherical SILs. When the SIL size is wavelength scale or smaller, aberrations are negligible due to the short optical path length. This insensitivity to minor variations in shape implies a large tolerance in nano-SIL fabrication.

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Type
conference paper
DOI
10.1117/12.2002145
Web of Science ID

WOS:000322826900030

Author(s)
Kim, Myun-Sik  
Scharf, Toralf  
Nguyen, David
Keeler, Ethan
Rydberg, Skyler
Nakagawa, Wataru
Osowiecki, Gael
Herzig, Hans Peter  
Voelkel, Reinhard
Editors
Vonfreymann, G.
•
Schoenfeld, Wv
•
Rumpf, Rc
Date Issued

2013

Publisher

Spie-Int Soc Optical Engineering

Publisher place

Bellingham

Published in
Advanced Fabrication Technologies For Micro/Nano Optics And Photonics Vi
ISBN of the book

978-0-8194-9382-8

Total of pages

7

Series title/Series vol.

Proceedings of SPIE

Volume

8613

Subjects

Solid immersion lens (SIL)

•

nano-fabrication

•

electron beam lithography (EBL)

•

thermal reflow

•

soft lithography

•

high-resolution interference microscope (HRIM)

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
OPT  
Event name
Conference on Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VI
Available on Infoscience
October 1, 2013
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/95876
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