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conference paper
Breaking the diffraction limit for optical nanolithography using plasmon optics
2002
Proc. Progress in Electromagnetic Research Symposium
Type
conference paper
Authors
Publication date
2002
Published in
Proc. Progress in Electromagnetic Research Symposium
Volume
1
Start page
751
Subjects
Peer reviewed
REVIEWED
EPFL units
Event name | Event place | Event date |
Cambridge, U.S.A | July 1-5 2002 | |
Available on Infoscience
February 14, 2012
Use this identifier to reference this record