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conference paper
Vertical co-integration of AlSi MEMS tunable capacitors and Cu inductors for tunable LC blocks
2006
MNE 2006
Use this identifier to reference this record
Type
conference paper
Web of Science ID
WOS:000247182500158
Authors
Publication date
2006
Published in
MNE 2006
Peer reviewed
REVIEWED
EPFL units
Available on Infoscience
May 16, 2007