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  4. GOLD MEMBRANES WITH LARGE ARRAYS OF SUB-µm HOLES FABRICATED BY WAFER-SCALE NANOSPHERE LITHOGRAPHY
 
conference paper not in proceedings

GOLD MEMBRANES WITH LARGE ARRAYS OF SUB-µm HOLES FABRICATED BY WAFER-SCALE NANOSPHERE LITHOGRAPHY

Klein, Mona Julia Katharina
•
Eckert, Rolf
•
Guillaumée, Mickaël
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2011
The 16th International Conference on Solid-State Sensors, Actuators and Microsystems

Gold membranes with large arrays of sub-µm holes were fabricated and optically characterized. The fabrication is a combination of a bottom-up, self-assembly based patterning technique, Nanosphere Lithography (NSL), and standard microfabrication. This was achieved by 1) up-scaling of the deposition of close-packed bead monolayers to 4’’ wafer substrates, 2) controlled bead size reduction, 3) etching of high aspect-ratio Si pillar arrays, 4) using the pillar arrays as a lift-off template, and 5) releasing the membranes by dry-etching. In this way, millimeter-size, 200 nm thick gold membranes with dense, short-range ordered hole arrays were fabricated. The array periodicity was either 428 nm or 535 nm, depending on the initial bead size. The hole diameter was tuned in the range of 150 nm to 250 nm. Optical transmission spectroscopy showed surface plasmon mediated extraordinary optical transmission (EOT) with an enhancement factor greater than two.

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Type
conference paper not in proceedings
Author(s)
Klein, Mona Julia Katharina
Eckert, Rolf
Guillaumée, Mickaël
Dunbar, L. Andrea
Heinzelmann, Harry
Brugger, Jürgen  
Pugin, Raphaël
Date Issued

2011

Subjects

nanosphere lithography

•

gold membrane

•

hole arrays

•

sub-wavelength holes

•

surface plasmons

•

extraordinary optical transmission

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LMIS1  
Event nameEvent placeEvent date
The 16th International Conference on Solid-State Sensors, Actuators and Microsystems

Beijing, China

June 5-9, 2011

Available on Infoscience
May 16, 2011
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/67393
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