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  4. Micromirrors for multiobject spectroscopy: optical and cryogenic characterization
 
conference paper

Micromirrors for multiobject spectroscopy: optical and cryogenic characterization

Waldis, Severin
•
Zamkotsian, Frederic
•
Lanzoni, Patrick
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2008
Proceedings of MOEMS and Miniaturized Systems VII
Conference on MOEMS and Miniaturized Systems VII

We are developing micromirror arrays (MMA) for future generation infrared multiobject spectroscopy (MOS) requiring cryogenic environment. So far we successfully realized small arrays of 5 x 5 single-crystalline silicon micromirrors. The 100 mu m x 200 mu m micromirrors show excellent surface quality and can be tilted by electrostatic actuation yielding 20 degrees mechanical tilt-angle. An electromechanical locking mechanism has been demonstrated that provides uniform tilt-angle within one arc minute precision over the whole array. Infrared MOS requires cryogenic environment and coated mirrors, silicon being transparent in the infrared. We report on the influence of the reflective coating on the mirror quality and on the characterization of the MMA in cryogenic environment. A Veeco/Wyko optical profiler was used to measure the flatness of uncoated and coated mirrors. The uncoated and unactuated micromirrors showed a peak-to-valley deformation (PTV) of below 10nm. An evaporated 10nm chrome/50nm gold coating on the mirror increased the PTV to 35nm; by depositing the same layers on both sides of the mirrors the PTV was reduced down to 17nm. Cryogenic characterization was carried out on a custom built interferometric characterization bench onto which a cryogenic chamber was mounted. The chamber pressure was at 10e-6 mbar and the temperature measured right next to the micromirror device was 86K. The micromirrors could be actuated before, during and after cryogenic testing. The PTV of the chrome/gold coated mirrors increased from 35nm to 50nm, still remaining in the requirements of < lambda/20 for lambda=1 mu m.

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Type
conference paper
DOI
10.1117/12.764381
Author(s)
Waldis, Severin
Zamkotsian, Frederic
Lanzoni, Patrick
Noell, Wilfried  
de Rooij, Nico  
Date Issued

2008

Publisher

SPIE-Intl Soc Optical Engineering, PO Box 10, Bellingham, Wa 98227-0010 Usa

Published in
Proceedings of MOEMS and Miniaturized Systems VII
Series title/Series vol.

Proceedings of The Society of Photo-Optical Instrumentation Engineers (SPIE); 6887

Start page

68870B

Subjects

micromirror

•

multiobject spectroscopy

•

Moems

•

mirror array

•

Drie

•

Arrays

Editorial or Peer reviewed

NON-REVIEWED

Written at

EPFL

EPFL units
SAMLAB  
Event nameEvent placeEvent date
Conference on MOEMS and Miniaturized Systems VII

San Jose, California, USA

January 22-23, 2008

Available on Infoscience
April 7, 2010
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/49241
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