research article
Ultra-low-energy ion-beam-synthesis of Ge nanocrystals in thin ALD Al2O3 layers for memory applications
Type
research article
Author(s)
Dimitrakis, P
Bonafos, Caroline
Schamm, Sylvie
BenAssayag, Gerard
Ioannou-Sougleridis, V
Schmidt, B
Becker, J
Normand, Pascal
Date Issued
2009
Published in
Issue
86
Start page
1838
End page
1841
Editorial or Peer reviewed
REVIEWED
Written at
OTHER
EPFL units
Available on Infoscience
November 9, 2009
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