conference paper
Limits of 3-D nanostructures fabricated by focused electron beam (FEB) induced deposition
2002
10th International Symposium on Nanostructures: Physics and Technology
Type
conference paper
Web of Science ID
WOS:000184080700002
Author(s)
Date Issued
2002
Publisher
Published in
10th International Symposium on Nanostructures: Physics and Technology
Start page
5
End page
11
Subjects
Note
Invited
Written at
EPFL
EPFL units
Available on Infoscience
July 20, 2009
Use this identifier to reference this record