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  4. Gradient free sol-gel Pb(Zr-x,Ti1-x)O-3 thin films
 
conference paper

Gradient free sol-gel Pb(Zr-x,Ti1-x)O-3 thin films

Calame, F.  
•
Muralt, P.  
2007
IEEE International Symposium on Applications of Ferroelectrics
16th IEEE International Symposium on Applications of Ferroelectrics

Pb(Zr-x,Ti1-x)O-3 thin films of homogeneous composition were synthesized by means of a modified sol-gel route on Pt(111)/TiOx/SiO2/Si substrates. The usually observed gradient in B-site composition could be reduced from +/- 12 to +/- 12.5 at% amplitude in Zr concentration fluctuations. The obtained 2 pin thick, dense and crack free films exhibited a {100}-texture index of 98.4%. Grain diameters increased at the same time by 50%. Dielectric and piezoelectric properties were remarkably improved. The relative dielectric constant epsilon(33f) was obtained as 1620, and the remanent transverse piezoelectric coefficient e(31f) was measured as -17.7 C/m(2).

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Type
conference paper
DOI
10.1109/ISAF.2007.4393173
Web of Science ID

WOS:000253416100027

Author(s)
Calame, F.  
Muralt, P.  
Date Issued

2007

Publisher

IEEE

Published in
IEEE International Symposium on Applications of Ferroelectrics
Start page

80

End page

82

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LC  
Event nameEvent placeEvent date
16th IEEE International Symposium on Applications of Ferroelectrics

Nara, Japan

May 27-31, 2007

Available on Infoscience
June 25, 2009
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/40887
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