conference paper
Sample preparation by means of electron beam lithography
2004
4ème Colloque Franco-Suisse
Type
conference paper
Author(s)
Date Issued
2004
Published in
4ème Colloque Franco-Suisse
Start page
15
Editorial or Peer reviewed
NON-REVIEWED
Written at
OTHER
EPFL units
Available on Infoscience
May 12, 2009
Use this identifier to reference this record