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research article
Micro-electromechanical systems for nanoscience
Type
research article
Author(s)
Staufer, U.
•
•
Beuret, C.
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•
•
Schürmann, G.
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Stebler, C.
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Date Issued
2000
Published in
Volume
2
Start page
413
End page
418
Note
234
Peer reviewed
REVIEWED
Written at
OTHER
EPFL units
Available on Infoscience
May 12, 2009
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