Loading...
research article
Replication of optical MEMS structures in sol-gel materials
Type
research article
Author(s)
Date Issued
2004
Published in
Volume
73-74
Start page
157
End page
160
Note
324
Peer reviewed
REVIEWED
Written at
OTHER
EPFL units
Available on Infoscience
May 12, 2009
Use this identifier to reference this record