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conference paper
Fabrication of Optical MEMS in Sol-Gel materials
2002
International Conference on Optical MEMS
Type
conference paper
Authors
Publication date
2002
Published in
International Conference on Optical MEMS
Start page
39
End page
40
Peer reviewed
NON-REVIEWED
EPFL units
Available on Infoscience
May 12, 2009
Use this identifier to reference this record