conference paper
Fabrication of Nanochannels Using Photolithography and Partial Etching of Sacrificial Layer
2004
Micro Total Analysis Systems TAS 2004
Type
conference paper
Author(s)
Date Issued
2004
Published in
Micro Total Analysis Systems TAS 2004
Start page
309
End page
311
Editorial or Peer reviewed
NON-REVIEWED
Written at
OTHER
EPFL units
Available on Infoscience
May 12, 2009
Use this identifier to reference this record