research article

Resonant Silicon Structures

Buser, R.
•
de Rooij, N. F.  
1989
Sensors and Actuators

Cite this item

Buser, R., & de Rooij, N. F. (1989). Resonant Silicon Structures. Sensors and Actuators, 17(1/2), 145–153. https://doi.org/10.1016/0250-6874(89)80074-5

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Type
research article
DOI
10.1016/0250-6874(89)80074-5
Author(s)
Buser, R.
de Rooij, N. F.  
Date Issued

1989

Published in
Sensors and Actuators
Volume

17

Issue

1/2

Start page

145

End page

153

Note

31

Editorial or Peer reviewed

REVIEWED

Written at

OTHER

EPFL units
SAMLAB  
Available on Infoscience
May 12, 2009
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/39121