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conference paper
Potential of dry etching for the fabrication of fused silica micro-optical elements
1999
Micromachine Technology for Diffractive and Holographic Optics
Use this identifier to reference this record
Type
conference paper
Authors
Publication date
1999
Published in
Micromachine Technology for Diffractive and Holographic Optics
Series title/Series vol.
Proc. SPIE; 3879
Start page
63
End page
70
EPFL units
Available on Infoscience
April 22, 2009