Cite this item

Vázquez-Mena, O., Sannomiya, T., Tosun, M., Voros, J., Villanueva, G., & Brugger, J. (2009). Analysis and Applications of Nanostructures Created by Stencil Lithography. The 15th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2009), Denver, Colorado, USA. https://infoscience.epfl.ch/handle/20.500.14299/35714

Click Copy to copy the citation, or select the text manually.