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conference paper
Diagnostics of an Industrial Plasma Reactor for Large Area Amorphous Silicon Cells
1995
13th EC Photovoltaic Solar Energy Conference
Type
conference paper
Authors
Sansonnens, L.
•
Franz, D.
•
Hollenstein, Ch.
•
Howling, A.
•
Schmitt, J.
•
Trulot, E.
•
Emeraud, T.
•
Kroll, U.
•
Meier, J.
•
Shah, A.
Publication date
1995
Published in
13th EC Photovoltaic Solar Energy Conference
Start page
276
End page
279
Note
IMT-NE Number: 209
Peer reviewed
REVIEWED
EPFL units
Available on Infoscience
February 10, 2009
Use this identifier to reference this record