conference presentation
Micro- and nano-patterning using local deposition through miniaturized shadow mask
2003
not available
Cite this item
Kim, G. M., & Brugger, J. (2003). Micro- and nano-patterning using local deposition through miniaturized shadow mask [Conference Presentation]. 5th Korean MEMS Conference, Jeju, Korea, May 16 C.E. https://infoscience.epfl.ch/handle/20.500.14299/3389
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Type
conference presentation
Author(s)
Date Issued
2003
Written at
EPFL
EPFL units
| Event name | Event place | Event date |
Jeju, Korea | 15-17 May, 2003 | |
Available on Infoscience
March 2, 2007
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