Antiferroelectric Multilayers Devices: a Platform for Energy and Information Storage
This work demonstrates a multifunctional platform that integrates energy storage and multi-bit memory capabilities using multilayer structures composed of antiferroelectric (AFE) Si:HfO2 layers with interleaved dielectric (DE) layers. We have fabricated multilayer AFE/dielectric capacitors with ultrathin 1 nm Al2O3 DE layers between the functional 10 nm AFE layers with up to 4 layers of Al2O3 and 4 layers of AFE, exploiting the internal built-in electric fields, with energy storage density up to 50 J/cm3, and enable stable, voltage-dependent multi-bit operation. The functions of energy and information storage within a compact doped-hafnia platform show the way towards a qualitatively new level of integration for future autonomous low-power systems for information processing. Our findings highlight a promising route for energy-efficient, high-density memory in next-generation electronics.
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Li, H.-W., Martinolli, N., Yang, K., Schlatter, T., Mauroux, O., Stolichnov, I., & Ionescu, A. M. (2026). Antiferroelectric Multilayers Devices: a Platform for Energy and Information Storage. IEEE Electron Device Letters, 1. https://doi.org/10.1109/led.2026.3710626
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École Polytechnique Fédérale de Lausanne
École Polytechnique Fédérale de Lausanne
École Polytechnique Fédérale de Lausanne
École Polytechnique Fédérale de Lausanne
École Polytechnique Fédérale de Lausanne
2026
1
1
REVIEWED
EPFL