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  4. Tri-layered XBAR with SiO2 middle layer
 
conference paper

Tri-layered XBAR with SiO2 middle layer

Plessky, Victor
•
Kucuk, Seniz
•
Zhang, Naiqing
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September 15, 2025
2025 IEEE International Ultrasonics Symposium (IUS)
2025 IEEE International Ultrasonics Symposium

XBARs enable the design of low-loss 5 GHz filters that meet the n79 Specification. Meanwhile, the device is fragile, and designers fight to achieve the desired power-handling levels. The temperature shifts of lithium niobate are high. Recently proposed periodically poled structures enhance device robustness and increase the relative passband width; however, they also inherit other drawbacks mentioned. Here, we propose a tri-layered XBAR structure with SiO2 as the middle layer, which is robust, has significantly better TCF, and is supposed to improve power handling capability radically.

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Type
conference paper
DOI
10.1109/ius62464.2025.11201589
Author(s)
Plessky, Victor
Kucuk, Seniz
Zhang, Naiqing
Villanueva, Luis G.  

École Polytechnique Fédérale de Lausanne

Date Issued

2025-09-15

Publisher

IEEE

Published in
2025 IEEE International Ultrasonics Symposium (IUS)
ISBN of the book

979-8-3315-2332-9

Subjects

XBAR

•

LiNbO3 layer

•

5 GHz

•

TCF

•

SiO2 layer

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
NEMS  
Event nameEvent acronymEvent placeEvent date
2025 IEEE International Ultrasonics Symposium

IUS 2025

Utrecht, Netherlands

2025-09-15 - 2025-09-18

Available on Infoscience
October 22, 2025
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/255171
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