Tri-layered XBAR with SiO2 middle layer
XBARs enable the design of low-loss 5 GHz filters that meet the n79 Specification. Meanwhile, the device is fragile, and designers fight to achieve the desired power-handling levels. The temperature shifts of lithium niobate are high. Recently proposed periodically poled structures enhance device robustness and increase the relative passband width; however, they also inherit other drawbacks mentioned. Here, we propose a tri-layered XBAR structure with SiO2 as the middle layer, which is robust, has significantly better TCF, and is supposed to improve power handling capability radically.
Cite this item
Plessky, V., Kucuk, S., Zhang, N., & Villanueva, L. G. (2025, September 15). Tri-layered XBAR with SiO2 middle layer. 2025 IEEE International Ultrasonics Symposium (IUS). 2025 IEEE International Ultrasonics Symposium, Utrecht, Netherlands, September 15, 2025. https://doi.org/10.1109/ius62464.2025.11201589
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École Polytechnique Fédérale de Lausanne
2025-09-15
979-8-3315-2332-9
REVIEWED
EPFL
| Event name | Event acronym | Event place | Event date |
IUS 2025 | Utrecht, Netherlands | 2025-09-15 - 2025-09-18 | |