conference paper not in proceedings
Challenges in RF plasma disposition on square-meter substrates
2003
Type
conference paper not in proceedings
Author(s)
Date Issued
2003
Note
Invited paper
Editorial or Peer reviewed
REVIEWED
Written at
EPFL
| Event name | Event place | Event date |
Juan-Les-Pins, Antibes, France | June/July 2003 | |
Available on Infoscience
May 13, 2008
Use this identifier to reference this record