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research article

Mechanical stress effect on imprint behavior of integrated ferroelectric capacitors

Gruverman, A.
•
Rodriguez, B. J.
•
Kingon, A. I.
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2003
Applied Physics Letters

Stress-induced changes in the imprint and switching behavior of (111)-oriented Pb(Zr,Ti)O-3 (PZT)-based capacitors have been studied using piezoresponse force microscopy. Visualization of polarization distribution and d(33)-loop measurements in individual 1x1.5-mum(2) capacitors before and after stress application, generated by substrate bending, provided direct experimental evidence of stress-induced switching. Mechanical stress caused elastic switching in capacitors with the direction of the resulting polarization determined by the sign of the applied stress. In addition, stress application turned capacitors into a heavily imprinted state characterized by strongly shifted hysteresis loops and almost complete backswitching after application of the poling voltage. It is suggested that substrate bending generated a strain gradient in the PZT layer, which produced asymmetric lattice distortion with preferential polarization direction and triggered polarization switching due to the flexoelectric effect. (C) 2003 American Institute of Physics.

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Type
research article
DOI
10.1063/1.1593830
Web of Science ID

WOS:000184336600046

Author(s)
Gruverman, A.
•
Rodriguez, B. J.
•
Kingon, A. I.
•
Nemanich, R. J.
•
Tagantsev, A. K.  
•
Cross, J. S.
•
Tsukada, M.
Date Issued

2003

Published in
Applied Physics Letters
Volume

83

Issue

4

Start page

728

End page

730

Subjects

scanning force microscopy

•

thin-films

•

polarization

•

ceramics

•

size

Note

Gruverman, A N Carolina State Univ, Raleigh, NC 27695 USA N Carolina State Univ, Raleigh, NC 27695 USA Ecole Polytech Fed Lausanne, Ceram Lab, CH-1015 Lausanne, Switzerland Fujitsu Labs Ltd, Atsugi, Kanagawa 2430197, Japan

704JM

Cited References Count:23

Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LC  
Available on Infoscience
August 21, 2006
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/233509
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