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research article

Gas spectrometry based on pyroelectric thin-film arrays integrated on silicon

Willing, B.
•
Kohli, M.
•
Muralt, P.  
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1998
Sensors and Actuators A: Physical

We report on a novel gas spectrometry technique using pyroelectric thin-him arrays. The 1 x 50 element arrays of PZT are integrated onto silicon using a membrane structure. The experimental characterization of the pyroelectric elements shows both high voltage and current responses in defined frequency ranges. Mounting the array as a detector in a commercial spectrometer, we demonstrate its capability of detecting the infrared absorption curves of gases by the example of CO2. (C) 1998 Elsevier Science S.A. All rights reserved.

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Type
research article
DOI
10.1016/S0924-4247(97)01736-6
Author(s)
Willing, B.
Kohli, M.
Muralt, P.  
Setter, N.  
Oehler, O.
Date Issued

1998

Published in
Sensors and Actuators A: Physical
Volume

66

Issue

1-3

Start page

109

End page

113

Subjects

pyroelectrics

•

thin-film arrays

•

gas spectrometers

•

infrared-sensors

•

detectors

Note

Willing, B Ecole Polytech Fed Lausanne, Lab Ceram, CH-1015 Lausanne, Switzerland Ecole Polytech Fed Lausanne, Lab Ceram, CH-1015 Lausanne, Switzerland Oehler & Fischer AG, CH-6300 Zug, Switzerland

Zj338

Cited References Count:13

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LC  
Available on Infoscience
August 21, 2006
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/233359
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