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  4. Fabrication and Characterization of Pzt Thin-Film Vibrators for Micromotors
 
research article

Fabrication and Characterization of Pzt Thin-Film Vibrators for Micromotors

Muralt, Paul  
•
Kohli, Markus
•
Maeder, Thomas
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1995
Sensors and Actuators A: Physical

For the first time we have characterized a micromotor driven by a piezoelectric PZT (PbZrxTi1-xO3) thin film. Sputter and sol-gel techniques have been applied for the deposition of the PZT films onto a silicon stator membrane, which is 20-30 mu m thick and has a diameter of 4 mm. The amplitudes of the membrane deflections are measured by means of laser interferometry. They are as large as 800 nm V-1 at the first resonance (26 kHz) and 60 nm V-1 at 1 kHz. This is one order of magnitude larger than previously reported for a ZnO-activated device of similar geometry. The motor operates at 1-3 V-r.m.s., with speeds of up to 200 rpm at 1.1 V-r.m.s. and torques of 35 nN m at 2.5 V-r.m.s. and 1 mN force between rotor and stator. Compared with the conceptually identical ZnO version published by Racine et al., this is an improvement by a factor of three in speed per volt. Taking into account the linear increase of the torque with the stator vibration frequency, the torque per volt is a factor of two higher. A long-term test of 100 h showed no degradation of the motor performance.

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1995 Muralt SNA - Si-PZT membrane vibrators for micromotors - preprint.pdf

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Preprint

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http://purl.org/coar/version/c_71e4c1898caa6e32

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openaccess

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1.4 MB

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Adobe PDF

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15d6bf0be32de642f4ebb0f4557c03ef

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