Repository logo

Infoscience

  • English
  • French
Log In
Logo EPFL, École polytechnique fédérale de Lausanne

Infoscience

  • English
  • French
Log In
  1. Home
  2. Academic and Research Output
  3. Journal articles
  4. Fabrication and Characterization of Pzt Thin-Film Vibrators for Micromotors
 
research article

Fabrication and Characterization of Pzt Thin-Film Vibrators for Micromotors

Muralt, Paul  
•
Kohli, Markus
•
Maeder, Thomas
Show more
1995
Sensors and Actuators A: Physical

For the first time we have characterized a micromotor driven by a piezoelectric PZT (PbZrxTi1-xO3) thin film. Sputter and sol-gel techniques have been applied for the deposition of the PZT films onto a silicon stator membrane, which is 20-30 mu m thick and has a diameter of 4 mm. The amplitudes of the membrane deflections are measured by means of laser interferometry. They are as large as 800 nm V-1 at the first resonance (26 kHz) and 60 nm V-1 at 1 kHz. This is one order of magnitude larger than previously reported for a ZnO-activated device of similar geometry. The motor operates at 1-3 V-r.m.s., with speeds of up to 200 rpm at 1.1 V-r.m.s. and torques of 35 nN m at 2.5 V-r.m.s. and 1 mN force between rotor and stator. Compared with the conceptually identical ZnO version published by Racine et al., this is an improvement by a factor of three in speed per volt. Taking into account the linear increase of the torque with the stator vibration frequency, the torque per volt is a factor of two higher. A long-term test of 100 h showed no degradation of the motor performance.

  • Files
  • Details
  • Metrics
Type
research article
DOI
10.1016/0924-4247(95)00994-9
Author(s)
Muralt, Paul  
Kohli, Markus
Maeder, Thomas
Kholkin, Andrei
Brooks, Keith
Setter, Nava  
Luthier, Roland
Date Issued

1995

Publisher

Elsevier

Published in
Sensors and Actuators A: Physical
Volume

48

Issue

2

Start page

157

End page

165

Subjects

micromotors

•

piezoelectrics

•

PZT

•

thin-film vibrators

Note

Muralt, P Fed Inst Technol,Ceram Lab,Ch-1015 Lausanne,Switzerland Asulab Sa,Smh Grp,Res Lab,Ch-2074 Marin Epagnier,Switzerland, Ry446, Times Cited:79, Cited References Count:15

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LC  
Available on Infoscience
August 21, 2006
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/233270
Logo EPFL, École polytechnique fédérale de Lausanne
  • Contact
  • infoscience@epfl.ch

  • Follow us on Facebook
  • Follow us on Instagram
  • Follow us on LinkedIn
  • Follow us on X
  • Follow us on Youtube
AccessibilityLegal noticePrivacy policyCookie settingsEnd User AgreementGet helpFeedback

Infoscience is a service managed and provided by the Library and IT Services of EPFL. © EPFL, tous droits réservés