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research article

Processing and properties of thin film pyroelectric devices

Kohli, Markus
•
Huang, Yuhong
•
Maeder, Thomas
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1995
Microelectronic Engineering

Pyroelectric PbTiO3 thin films devices with two temperature compensating elements on a SiO2/Si3N4 membranes have been fabricated and characterized. The measured voltage responsivity as a function of radiation modulation frequency has been compared to finite element model calculation. The relevant film properties have been compared for sputter and a sol-gel deposition techniques. The calculated responsivity amounts to 30 V/W. The measured pyroelectric signal is a few mu V.

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1995 Kohli ME - pyroelectric PbTiO3 thin films - postprint.pdf

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Postprint

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Accepted version

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openaccess

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618.26 KB

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Adobe PDF

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4053faeab2b4f4a577c29637efbf5d7a

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