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  4. Investigation of Pb(Zr0.70Ti0.30)O-3 thin films of different textures on Ti/Pt electrodes
 
research article

Investigation of Pb(Zr0.70Ti0.30)O-3 thin films of different textures on Ti/Pt electrodes

Brooks, K.
•
Klissurska, R.
•
Moeckli, P.
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1995
Microelectronic Engineering

Pb(Zr0.70Ti0.30)O-3 rhombohedral thin films of (100), (110)/(111) and (111) textures were prepared on Si wafers with Ti/Pt electrodes. Microstructures and textures were characterized by XRD, SEM, TEM, and AFM. Ferroelectric, dielectric and fatigue properties were measured. Dielectric constants of 1050, 880, and 920 were obtained for the (100), (110)/(111), and (111) films. Remanent and saturation polarizations increased in the order (100), (110)/(111), (111) at high fields. Coercive field values of 27, 43 and 31 kV/cm were measured for the (100), (110)/(111), and (111) samples, respectively, at 300 kV/cm. Similar fatigue characteristic were observed for all films at 300kV/cm, showing an initial increase in switched polarization followed by a decline at 10(7) - 10(8) switching cycles. Observed differences in the measured properties are explained based on allowed polarization directions for given textures, and film microstructure.

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Type
research article
DOI
10.1016/0167-9317(95)00163-8
Web of Science ID

WOS:A1995TP60800059

Author(s)
Brooks, K.
Klissurska, R.
Moeckli, P.
Setter, N.  
Date Issued

1995

Published in
Microelectronic Engineering
Volume

29

Issue

1-4

Start page

293

End page

296

Note

Brooks, K Ecole Polytech Fed Lausanne,Lab Ceram,Ch-1015 Lausanne,Switzerland

Tp608

Cited References Count:12

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LC  
Available on Infoscience
August 21, 2006
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/233253
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