Repository logo

Infoscience

  • English
  • French
Log In
Logo EPFL, École polytechnique fédérale de Lausanne

Infoscience

  • English
  • French
Log In
  1. Home
  2. Academic and Research Output
  3. Journal articles
  4. Nanomechanical structures with 91 MHz resonance frequency fabricated by local deposition and dry etching
 
research article

Nanomechanical structures with 91 MHz resonance frequency fabricated by local deposition and dry etching

Kim, GM  
•
Kawai, S
•
Nagashio, M
Show more
2004
Journal of Vacuum Science and Technology B

We report an all-dry, two-step, surface nanoengineering method to fabricate nanomechanical elements without photolithography. It is based on the local deposition through a nanostencil of a well-defined aluminum pattern onto a silicon/silicon-nitride substrate, followed by plasma etching to release the structures. The suspended 100-nm-wide, 2-mum-long, and 300-nm-thick nanolevers and nanobridges have natural resonance frequencies of 50 and 91 MHz, respectively. The fabrication method is scalable to a full wafer and allows for a variety of materials to be structured on arbitrary surfaces, thus opening new types of nanoscale mechanical systems.

  • Files
  • Details
  • Metrics
Loading...
Thumbnail Image
Name

KimGM_2004_JVSTB.pdf

Access type

openaccess

Size

289.16 KB

Format

Adobe PDF

Checksum (MD5)

d504f484ffb1c7435c0d8d5321e4e832

Logo EPFL, École polytechnique fédérale de Lausanne
  • Contact
  • infoscience@epfl.ch

  • Follow us on Facebook
  • Follow us on Instagram
  • Follow us on LinkedIn
  • Follow us on X
  • Follow us on Youtube
AccessibilityLegal noticePrivacy policyCookie settingsEnd User AgreementGet helpFeedback

Infoscience is a service managed and provided by the Library and IT Services of EPFL. © EPFL, tous droits réservés