conference paper
Actuation bandwidth extension of an integrated piezo-optomechanical nanophotonic device
January 1, 2021
2021 Conference On Lasers And Electro-Optics (Cleo)
We demonstrate a novel technique of contour-mode suppression of an integrated MEMS-photonic chip up to the first HBAR mode at 17 MHz. The flattened actuation response is critical to the development of compact LiDAR engine or low-noise frequency-agile laser. (c) 2021TheAuthor(s)
Type
conference paper
Web of Science ID
WOS:000831479801256
Author(s)
Lihachev, Grigory
Tian, Hao
Bhave, Sunil A.
Date Issued
2021-01-01
Publisher
Publisher place
New York
Published in
2021 Conference On Lasers And Electro-Optics (Cleo)
ISBN of the book
978-1-943580-91-0
Series title/Series vol.
Conference on Lasers and Electro-Optics
Editorial or Peer reviewed
REVIEWED
Written at
EPFL
EPFL units
| Event name | Event place | Event date |
ELECTR NETWORK | May 09-14, 2021 | |
Available on Infoscience
September 12, 2022
Use this identifier to reference this record