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  4. Fabrication, Characterization, and Simulation of Glass Devices with AlN Thin-Film Transducers for Excitation of Ultrasound Resonances
 
review article

Fabrication, Characterization, and Simulation of Glass Devices with AlN Thin-Film Transducers for Excitation of Ultrasound Resonances

Steckel, Andre G.
•
Bruus, Henrik
•
Muralt, Paul  
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July 7, 2021
Physical Review Applied

We present the fabrication of 570-mu m-thick millimeter-sized soda-lime-silicate float-glass blocks with a 1-mu m-thick AlN thin-film piezoelectric transducer sandwiched between thin metallic electrodes and deposited on the top surface. The electromechanical properties are characterized by electrical-impedance measurements in the frequency range from 0.1 to 10 MHz with a peak-to-peak voltage of 0.5 V applied to the electrodes. We measure the electrical-impedance spectra of 35 devices, all of width 2 mm, but with nine different lengths ranging from 2 to 6 mm and with two to seven copies of each individual geometry. Each impedance spectrum exhibits many resonance peaks, and we carefully measure the five most prominent ones in each spectrum. We compare the resulting 173 experimental resonance frequencies with simulation results from a finite-element-method model that we develop. When we use the material parameters from the manufacturer, we obtain an average relative deviation of the 173 simulated resonance frequencies from the experimental values of (-4.6 +/- 0.1)%. When we optimize the values of the Young's modulus and Poisson's ratio of the float glass in the simulation, this relative deviation decreases to (-0.5 +/- 0.1)%. Our results suggest a method for an accurate in situ determination of the acoustic parameters at ultrasound frequencies of any elastic solid onto which a thin-film transducer can be attached.

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Type
review article
DOI
10.1103/PhysRevApplied.16.014014
Web of Science ID

WOS:000677937300002

Author(s)
Steckel, Andre G.
Bruus, Henrik
Muralt, Paul  
Matloub, Ramin
Date Issued

2021-07-07

Publisher

AMER PHYSICAL SOC

Published in
Physical Review Applied
Volume

16

Issue

1

Article Number

014014

Subjects

Physics, Applied

•

Physics

•

stress

•

moduli

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LC  
Available on Infoscience
August 14, 2021
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/180601
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