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research article

Improved measurement of electric fields by nanobeam precession electron diffraction

Bruas, L.
•
Boureau, V  
•
Conlan, A. P.
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May 29, 2020
Journal Of Applied Physics

The electric field in a silicon p-n junction has been measured using pixelated scanning transmission electron microscopy. By using a convergence angle of 3.2mrad, a spatial resolution better than 1nm can be achieved leading to a rigid shift of the transmitted beam as it passes through an electric field. By precessing the beam around the optical axis at an angle of 0.1 degrees, the effects of dynamical diffraction can be reduced. This leads to an improved measurement of the electric field from the shift of the transmitted beam. Different algorithms have been used to measure this shift, and template matching leads to a more accurate measurement of the electric field than the often-used center of mass method.

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Type
research article
DOI
10.1063/5.0006969
Web of Science ID

WOS:000537105600003

Author(s)
Bruas, L.
Boureau, V  
Conlan, A. P.
Martinie, S.
Rouviere, J-L
Cooper, D.
Date Issued

2020-05-29

Published in
Journal Of Applied Physics
Volume

127

Issue

20

Article Number

205703

Subjects

Physics, Applied

•

Physics

•

differential phase-contrast

•

holography

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
CIME  
Available on Infoscience
June 14, 2020
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/169268
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