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research article

A high-performance compact electromagnetic actuator for a PMMA ball-valve micropump

Shen, M.  
•
Yamahata, C.  
•
Gijs, M. A. M.  
2008
Journal of Micromechanics and Microengineering

We present the microfabrication and characterization of a reciprocating-type poly(methylmetacrylate) (PMMA) ball-valve micropump which is actuated with a high-performance and compact electromagnetic circuit of centimeter size. We have improved by finite element calculations the magnetic design of the electromagnet that actuates a NdFeB permanent magnet embedded in a poly(dimethylsiloxane) (PDMS) pumping membrane. Powder blasting technology and conventional micromachining techniques are employed for the microstructuring of PMMA layers. The ball-valve micropump is bubble tolerant and has self-priming capabilities. It has a resonant frequency of around 20 Hz, and it exhibits a backpressure up to 37 kPa; water is pumped at flow rates up to 6.8 mL min−1 for a 2 W electromagnetic actuation power. The actuation frequency dependence of the flow rate can be well described by a fluidic damped oscillator model.

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Type
research article
DOI
10.1088/0960-1317/18/2/025031
Web of Science ID

WOS:000252966100031

Author(s)
Shen, M.  
Yamahata, C.  
Gijs, M. A. M.  
Date Issued

2008

Publisher

Institute of Physics

Published in
Journal of Micromechanics and Microengineering
Volume

18

Issue

2

Article Number

025031

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LA  
LMIS2  
Available on Infoscience
January 16, 2008
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/16268
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